真(zhen)(zhen)(zhen)空(kong)(kong)鍍(du)(du)膜(mo)(mo)(mo)(mo)材料技(ji)術是真(zhen)(zhen)(zhen)空(kong)(kong)應(ying)用(yong)(yong)(yong)(yong)技(ji)術的(de)(de)(de)(de)(de)(de)一(yi)(yi)個(ge)(ge)重要(yao)分支,它(ta)已廣泛地應(ying)用(yong)(yong)(yong)(yong)于光(guang)(guang)學、電(dian)(dian)(dian)子學、能源開(kai)發,理(li)化(hua)儀器(qi)(qi)(qi)、建(jian)筑機(ji)械(xie)、包(bao)(bao)(bao)裝、民(min)用(yong)(yong)(yong)(yong)制(zhi)品、表(biao)面(mian)科學以(yi)(yi)及(ji)科學研究等(deng)領域中。真(zhen)(zhen)(zhen)空(kong)(kong)鍍(du)(du)膜(mo)(mo)(mo)(mo)所(suo)(suo)采(cai)用(yong)(yong)(yong)(yong)的(de)(de)(de)(de)(de)(de)方(fang)(fang)法(fa)主(zhu)要(yao)有蒸發鍍(du)(du)、濺射(she)鍍(du)(du)、離(li)子鍍(du)(du)、束(shu)流沉(chen)積(ji)鍍(du)(du)以(yi)(yi)及(ji)分子束(shu)外延(yan)等(deng)。此外還有化(hua)學氣相沉(chen)積(ji)法(fa)。如(ru)(ru)果(guo)從真(zhen)(zhen)(zhen)空(kong)(kong)鍍(du)(du)膜(mo)(mo)(mo)(mo)的(de)(de)(de)(de)(de)(de)目的(de)(de)(de)(de)(de)(de)是為(wei)(wei)了改變(bian)物(wu)質(zhi)表(biao)面(mian)的(de)(de)(de)(de)(de)(de)物(wu)理(li)、化(hua)學性能的(de)(de)(de)(de)(de)(de)話,這一(yi)(yi)技(ji)術又是真(zhen)(zhen)(zhen)空(kong)(kong)表(biao)面(mian)處理(li)技(ji)術中的(de)(de)(de)(de)(de)(de)重要(yao)組(zu)成部分,其分類如(ru)(ru)表(biao) 6 所(suo)(suo)示(shi)。現(xian)就(jiu)其幾(ji)個(ge)(ge)主(zhu)要(yao)應(ying)用(yong)(yong)(yong)(yong)方(fang)(fang)面(mian)做一(yi)(yi)簡單介(jie)紹。首(shou)先在(zai)光(guang)(guang)學方(fang)(fang)面(mian),一(yi)(yi)塊光(guang)(guang)學玻(bo)璃或石英表(biao)面(mian)上鍍(du)(du)一(yi)(yi)層(ceng)或幾(ji)層(ceng)不同物(wu)質(zhi)的(de)(de)(de)(de)(de)(de)薄(bo)膜(mo)(mo)(mo)(mo)后,即(ji)可(ke)(ke)(ke)成為(wei)(wei)高(gao)反射(she)或無反射(she)(即(ji)增(zeng)透膜(mo)(mo)(mo)(mo))或者作(zuo)任何(he)預期比例的(de)(de)(de)(de)(de)(de)反射(she)或透射(she)材料,也(ye)可(ke)(ke)(ke)以(yi)(yi)作(zuo)成對(dui)某種(zhong)(zhong)波(bo)長的(de)(de)(de)(de)(de)(de)吸(xi)收,而對(dui)另一(yi)(yi)種(zhong)(zhong)波(bo)長的(de)(de)(de)(de)(de)(de)透射(she)的(de)(de)(de)(de)(de)(de)濾(lv)色片。高(gao)反射(she)膜(mo)(mo)(mo)(mo)從大(da)(da)口徑的(de)(de)(de)(de)(de)(de)天(tian)文望遠鏡和(he)各(ge)種(zhong)(zhong)激光(guang)(guang)器(qi)(qi)(qi)開(kai)始、一(yi)(yi)直到新型(xing)建(jian)筑物(wu)的(de)(de)(de)(de)(de)(de)大(da)(da)窗(chuang)鍍(du)(du)膜(mo)(mo)(mo)(mo)茉(mo)莉,都(dou)很(hen)需要(yao)。增(zeng)透膜(mo)(mo)(mo)(mo)則(ze)大(da)(da)量用(yong)(yong)(yong)(yong)于照相和(he)各(ge)種(zhong)(zhong)激光(guang)(guang)器(qi)(qi)(qi)開(kai)始、一(yi)(yi)直到新型(xing)建(jian)筑物(wu)的(de)(de)(de)(de)(de)(de)大(da)(da)窗(chuang)鍍(du)(du)膜(mo)(mo)(mo)(mo)玻(bo)璃,都(dou)很(hen)需要(yao)。增(zeng)透膜(mo)(mo)(mo)(mo)則(ze)大(da)(da)量用(yong)(yong)(yong)(yong)于照相機(ji)和(he)電(dian)(dian)(dian)視攝(she)象(xiang)機(ji)的(de)(de)(de)(de)(de)(de)鏡頭(tou)上。在(zai)電(dian)(dian)(dian)子學方(fang)(fang)面(mian)真(zhen)(zhen)(zhen)空(kong)(kong)鍍(du)(du)膜(mo)(mo)(mo)(mo)更占有極為(wei)(wei)重要(yao)的(de)(de)(de)(de)(de)(de)地位。各(ge)種(zhong)(zhong)規模的(de)(de)(de)(de)(de)(de)繼承電(dian)(dian)(dian)路。包(bao)(bao)(bao)括存貯器(qi)(qi)(qi)、運算器(qi)(qi)(qi)、告訴邏輯元(yuan)件等(deng)都(dou)要(yao)采(cai)用(yong)(yong)(yong)(yong)導(dao)電(dian)(dian)(dian)膜(mo)(mo)(mo)(mo)、絕緣膜(mo)(mo)(mo)(mo)和(he)保護(hu)膜(mo)(mo)(mo)(mo)。作(zuo)為(wei)(wei)制(zhi)備電(dian)(dian)(dian)路的(de)(de)(de)(de)(de)(de)掩膜(mo)(mo)(mo)(mo)則(ze)用(yong)(yong)(yong)(yong)到鉻膜(mo)(mo)(mo)(mo)。磁(ci)帶、磁(ci)盤、半導(dao)體激光(guang)(guang)器(qi)(qi)(qi),約瑟夫遜(xun)器(qi)(qi)(qi)件、電(dian)(dian)(dian)荷耦(ou)合器(qi)(qi)(qi)件( CCD )也(ye)都(dou)甬(yong)道各(ge)種(zhong)(zhong)薄(bo)膜(mo)(mo)(mo)(mo)。在(zai)顯示(shi)器(qi)(qi)(qi)件方(fang)(fang)面(mian),錄(lu)象(xiang)磁(ci)頭(tou)、高(gao)密度錄(lu)象(xiang)帶以(yi)(yi)及(ji)平面(mian)顯示(shi)裝置的(de)(de)(de)(de)(de)(de)透明導(dao)電(dian)(dian)(dian)膜(mo)(mo)(mo)(mo)、攝(she)像管(guan)光(guang)(guang)導(dao)膜(mo)(mo)(mo)(mo)、顯示(shi)管(guan)熒光(guang)(guang)屏的(de)(de)(de)(de)(de)(de)鋁襯(chen)等(deng)也(ye)都(dou)是采(cai)用(yong)(yong)(yong)(yong)真(zhen)(zhen)(zhen)空(kong)(kong)鍍(du)(du)膜(mo)(mo)(mo)(mo)法(fa)制(zhi)備。在(zai)元(yuan)件方(fang)(fang)面(mian),在(zai)真(zhen)(zhen)(zhen)空(kong)(kong)中蒸發鎳鉻,鉻或金(jin)(jin)屬陶瓷可(ke)(ke)(ke)以(yi)(yi)制(zhi)造(zao)電(dian)(dian)(dian)阻,在(zai)塑料上蒸發鋁、一(yi)(yi)氧化(hua)硅、二(er)氧化(hua)鈦(tai)等(deng)可(ke)(ke)(ke)以(yi)(yi)制(zhi)造(zao)電(dian)(dian)(dian)容器(qi)(qi)(qi),蒸發硒可(ke)(ke)(ke)以(yi)(yi)得到靜(jing)電(dian)(dian)(dian)復(fu)印(yin)機(ji)用(yong)(yong)(yong)(yong)的(de)(de)(de)(de)(de)(de)硒鼓、蒸發鈦(tai)酸鋇可(ke)(ke)(ke)以(yi)(yi)制(zhi)造(zao)磁(ci)致伸縮的(de)(de)(de)(de)(de)(de)起(qi)(qi)聲元(yuan)件等(deng)等(deng)。真(zhen)(zhen)(zhen)空(kong)(kong)蒸發還可(ke)(ke)(ke)以(yi)(yi)用(yong)(yong)(yong)(yong)于制(zhi)造(zao)超導(dao)膜(mo)(mo)(mo)(mo)和(he)慣性約束(shu)巨變(bian)反應(ying)用(yong)(yong)(yong)(yong)的(de)(de)(de)(de)(de)(de)微珠鍍(du)(du)層(ceng)。此外還可(ke)(ke)(ke)以(yi)(yi)對(dui)珠寶、鐘表(biao)外殼(ke)表(biao)面(mian)、紡(fang)織(zhi)品金(jin)(jin)屬花紋、金(jin)(jin)絲(si)銀絲(si)線等(deng)蒸鍍(du)(du)裝飾用(yong)(yong)(yong)(yong)薄(bo)膜(mo)(mo)(mo)(mo),以(yi)(yi)及(ji)采(cai)用(yong)(yong)(yong)(yong)濺射(she)鍍(du)(du)或離(li)子鍍(du)(du)對(dui)刀具(ju)、模具(ju)等(deng)制(zhi)造(zao)超硬膜(mo)(mo)(mo)(mo)。近(jin)兩年(nian)內所(suo)(suo)興起(qi)(qi)的(de)(de)(de)(de)(de)(de)多弧(hu)離(li)子鍍(du)(du)制(zhi)備鈦(tai)金(jin)(jin)制(zhi)品,如(ru)(ru)不銹鋼薄(bo)板、鏡面(mian)板、包(bao)(bao)(bao)柱、扶手(shou)、高(gao)檔床托(tuo)架(jia)、樓梯欄桿等(deng)目前正(zheng)在(zai)盛行。
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